How does ZEISS SEM help you in your work and research?

The ZEISS GeminiSEM 500 SEM has been in use for more than 6 years. As an important tool for material science research, it is one of the most frequently used large-scale equipment in our center, serving more than 2000 hours for teachers and students inside and outside the school every year. The ZEISS GeminiSEM 500 SEM provides a large amount of indispensable technical support for many research groups at the university, including the academician research group. For example, in 2022, it has served more than 50 major projects of the National Natural Science Foundation, National Outstanding Youth Science Fund projects, National Key research and development programs, and key research and development programs of the Ministry of Science and Technology, supported more than 200 SCI scientific research papers, and more than 60 EI and CSCD papers. In addition, according to the national sharing service requirements for large scientific instruments and equipment, it also provides high-resolution SEM testing needs for universities, research institutes and high-tech enterprises in the surrounding areas.

On the other hand, we are the first in the country to offer electron microscopy experimental training courses for graduate students to cultivate their hands-on ability and the ability to independently operate large equipment to solve scientific research problems, so that students can be in line with international standards. Students who complete the course can get the corresponding credits and also be awarded the computer operation certificate. After they arrive at the institute of the Chinese Academy of Sciences, with this certificate, they have the qualification to independently operate scanning electron microscopy in subsequent scientific research work. This makes our courses very popular! Some graduate students used the results of our electron microscopy to participate in the national innovation and entrepreneurship competition, as well as photomicrography competition and so on, and have obtained good results.

What do you like best about ZEISS Electron Microscopy?

I think the design of ZEISS Gemini is a revolution in electron microscopy technology. In traditional SEM, the electron beam needs to be converged several times in the tube and then focused on the surface of the sample for scanning imaging. The ZEISS Gemini tube's parallel electron beam technology is a subversion of traditional cognition, and it has proved to be very successful, providing excellent resolution while maintaining beam flow. After the launch of Gemini technology, we as customers have gone from novelty to recognition, to now familiarity. After your patent expires at the end of 20 years, you will see that other manufacturers are going to follow suit, which will further reflect the leadership of ZEISS Gemini technology. In addition to the advantages of the electron tube, ZEISS SEM also has a large sample chamber and a relatively large number of flange interfaces, which provides customers with a lot of possibilities for later functional expansion and development. Not only can we flexibly carry some third-party accessories in the electron microscope, such as energy spectrum and EBSD on our ZEISS Gemini500 SEM, but also can be used in the electron microscope. On this basis, the extension devices such as in situ stretching and heating table can also be developed, so that the in-situ mechanics and in-situ EBSD experiments are very convenient and safe.

What suggestions do you have for ZEISS services?

ZEISS Has a lot of cutting-edge scientific research equipment and has achieved very good results in China over the years, which is inseparable from the starting point of ZEISS's focus on helping customers solve scientific problems. ZEISS Has Excellent Core Technology, the quality of equipment is reliable, and good technical service. Our ZEISS G500 SEM has been installed for more than 6 years and has been running very stable. Moreover, ZEISS Has Local Application Engineers and after-sales engineers in Hefei, which are very timely in terms of after-sales response and maintenance. Your meticulous care for customers has not only made us happy, but also benefited the customers in the whole Hefei area. I hope that in the future ZEISS Will Organize Some Meetings to increase the communication and interaction between ZEISS and its users, as well as between us and other ZEISS electron microscopy users.

What research are you currently doing & what imaging challenges were you facing?

As you might know, Daegu Technopark is a corporate support institute for technological innovation and development for regional companies, and provides corporate support projects for prototypes, start-up products, R&D, and defect analysis using electron microscopy.

We normally deal with various types of samples, such as nanomaterials/components, ceramics, metals, polymers, bio, or semiconductors, from diverse customers (both industries and academics). So there were some difficulties in imaging or measurement methods and preparation work when it comes to unfamiliar samples.

How did the ZEISS GeminiSEM column help you solve those challenges?

The biggest pain point came out when we encountered unfamiliar samples was preparation. There are multiple ways of sample preparation. For example, we used to cut the sample for surface observation, and cutting creates chafing, so the preparation is important. There was a case where preparation took half a day, while imaging itself only took 30 minutes.

The ZEISS GeminiSEM column shows great results in low kV, so it helped a lot with non-coating samples or polymers, etc. Especially, there was a company related to permanent magnets which are used for electric vehicle motors. Before we used the ZEISS GeminiSEM column, we needed to demagnetize before imaging, but now the system removed this preparation step. And the capability of BSE and Inlens detector is superior to other systems, so we always use the ZEISS GeminiSEM column when measuring metal samples.

How do you use the ZEISS GeminiSEM column in your work?

The biggest progress with the ZEISS GeminiSEM column in my center is regarding the use of probe. While the semiconductor samples were getting spotlighted, it was not easy to image as semiconductor wafers have low conductivity and contact points are small and difficult to find.

We used to measure the resistance of them by hand, but it led to errors because of the vibration and became more impossible as samples got smaller and smaller. So we started to use probe, which is based on non-coating samples. From the beginning, charging caused some troubles, but soon the performance of the ZEISS GeminiSEM column at low kV supported our research a lot. In addition, we can apply a voltage by touching the probe to the sample, and pass electricity through the semiconductor circuit to image what's on the surface or inside.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

At the time of transformation from resistive to capacitive type in Touch Panel Screen, ITO (Indium Tin Oxide) was the biggest challenge. We went through several experiments, but it showed different resistances even under the same condition. Before using the ZEISS GeminiSEM column, the capability was only to check the grain size, and the heating process for BSE changed the crystals, making fine-imaging difficult. At last, with low kV imaging by ZEISS GeminiSEM Inlens detector, we were able to capture the real image of ITO crystals.

And when we were doing a research on secondary battery anode material, from cross-section imaging, we acquired the crystal grain structure and element distribution using BSE. Customers were very satisfied with our results, and the range of application field was expanded from raw/finished materials to defects analysis. Most of our cases are ceramics, metals (crystals, composites, etc.), and defect analysis (foreign matter identification), and BSE helps to see the contrast easily.

If someone is considering the Gemini-column now, what would you tell them?

Based on my experience, the ZEISS GeminiSEM column has shown excellent performances with low kV, magnetic samples, and BSE detector. Depending on your primary sample, you might have different needs, but I believe you can get the results you want with excellent contrast and high resolution images in a wide range of applications. Especially in BSE, the ZEISS GeminiSEM will create crisper and cleaner images than other systems!

What research are you currently doing & what imaging challenges were you facing?

My main responsibilities at the 3D Printing Quality Evaluation Center are 3D-related R&D, analysis and evaluation of materials and outputs, and technical support for small and medium-sized enterprises. Before using the ZEISS GeminiSEM, in order to observe samples with high resolution, we had to apply high voltage to image them, which caused damage like burning on the surface of polymer specimens. Furthermore, in the case of non-conductive materials like porous materials or ceramics, surface charging problems occurred, so it was difficult to acquire a good quality image.

How did the ZEISS GeminiSEM column help you solve those challenges?

To reduce charging problems, we used to put a coating on samples. We spent more than 15 minutes for preparation when we tested non-conductive porous ceramics. Even this method could only be used for surface analysis, not for structure analysis. These days, more cases with non-conductive samples in complex structures occur, and more severe charging issues occur. However, as the ZEISS GeminiSEM column enables high resolution in low kV, analysis of samples that are sensitive to the electron beam became easy, and it is really useful when we analyze a magnetic sample.

How do you use the ZEISS GeminiSEM column in your work?

I use it to image 3D printing-related polymeric materials, metal powders, or composites. In the case of metal powders like STS316L, 17-4PH, or Inconel718, etc., I was able to analyze powder morphology, sphericity, particle size distribution, density, and flow diagrams with the ZEISS GeminiSEM. This helped the R&D of magnetic cores, such as amorphous or ferrite, automotive/medical/military components, and electronic devices like mobile phones.

With medical materials, like PE, PS, TPU, or polyurethane thermoplastics, etc., I went through mechanical and thermal characterization and density analysis. Dental prosthetics, medical orthopaedics, and manufacturing for heat-resistant high-elongation parts benefited from the analysis. For household/industrial composites and outputs used for unstructured PC framework or pressed molds, I performed additive analysis, dissimilar material adhesion analysis, thermal stability, and impact strength analysis.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

The ZEISS GeminiSEM column enables me to observe the interfaces between the continuous yarn fibers and the base material, and it gives us a major contribution to the research on optimizing composite output conditions. In the 3D printing process using spherical powders, voids inevitably came out, and we tried to fill them with carbon fibers. We needed to know how much the gap was between the dissimilar materials, or observe the cross-section by breaking/cutting them with a knife. The capability of the ZEISS GeminiSEM column at low kV helped us a lot at this point.

Also, the ZEISS GeminiSEM column is very useful when it comes to imaging defects on the surface of powder generated from atomizing. Powder needs to be the most stable spherical for successful 3D printing. The ZEISS GeminiSEM shows images with more accurate particle distribution and size, compared to infrared diffraction methods which we used before. We also used Confomap, an image analysis program, to process the ZEISS GeminiSEM images.

If someone is considering the ZEISS GeminiSEM column now, what would you tell them?

I can pick two points for the reason why I recommend the ZEISS GeminiSEM column.

First, the ZEISS GeminiSEM column has versatility that enables it to image a wide range of materials, and this leads to various adaptations of the ZEISS GeminiSEM column to diverse research and analysis. In addition, you can acquire high-quality images faster than the other systems, increasing your research efficiency!

What research are you currently doing & what imaging challenges were you facing?
I perform a number of government assignments and external corporate analysis request with ZEISS Crossbeam 550. Various types of samples, like secondary battery materials, electronic materials, and semiconductor materials, are being imaged with FIB-SEM analysis.

It was one of our biggest challenges when we received a sample which is not suitable for normal FIB experiment. If we had a normal FIB experiment to the polymer, thermally sensitive, moisture-containing, or viscous samples, there used be a damage to the sample. Sometimes there were samples contain graphene, and even customers did not know about their samples was the case.

How did GEMINI column help you solve those challenges?
First of all, with Gemini Column, I can get a high resolution SEM image even in low kV. And capability of Cryo analysis makes the system more powerful. Samples that had damage before with normal FIB experiment, especially moisture-containing or FIB-susceptible, now can be analyzed and used in various fields. Especially as the secondary battery market grows, it gets more needed for analysis of secondary battery materials, and we are solving the existing limitation by utilizing FIB-SEM 3D tool and Cryo.

Secondary batteries, often referred to as high-tech materials or polymeric materials, requires milling at different temperatures depending on the components or content of the separator (combination of PP and PE).

Different cryo temperatures are required to ensure high quality imaging and no damage to the sample. Even we are still working on the optimal sample preparation and temperature adjustment, cryo FIB 3D milling expanded the possibility of our research and experiments.

How do you use the GEMINI column in your work?
We use different analyses each time depending on the research project, but mostly we use (Cryo) FIB-SEM cross-section and 3D analysis. For FIB-SEM analysis, laser milling preparation has been done to samples with uneven cross-sections or irregular size and shape. It is not a big problem in multifaceted milling, but in 3D milling, if there is no cross-section preparation, the coordinates can wander and shift can be occurred on the surface. No sample prep. has resulted in bumpy coatings and no exact ROI target, and ended up with bad images.

Now with the newly installed TILT HOLDER, we are pushing the bumpy surface before start of the imaging. When analyzing internal structures, we also try to get the best images by adapting various detectors that suit the characteristics of each material. Lastly, after FIB-SEM analysis, the acquired images can be processed using software to model the properties of the sample. For 3D milling, we need to push the sample to a certain depth, image its position, and combine the cropped images, and Dragonfly software makes it possible.

What can kind of results are you able to achieve w the GEMINI column?
There was a SEM analysis request from a external corporate that needed to acquire images of the sample pole surface. Customer’s previous experiment ended up with unsatisfied images, as there was a capability limitation of existing equipment. After we had some preparation processes with thin-coating, low kV imaging had shown a high quality, satisfying result. In addition, depends on the characteristic of materials, we used various detectors and were able to obtain images that could not be acquired by other systems or other institutes.

  

I graduated from National Tsing Hua University in 1983, and received an MS from NSYSU in 1985 and a Ph.D. from Michigan State University in 1993, both in Materials Science. In my early research career, I mainly utilized transmission electron microscopy to characterize microstructures of metals and semiconductors. In 1996, I worked at China Steel Corporation at the moment, and Professor Po-We Kao and Professor Chih-Pu Chang at NSYSU introduced the first two EBSD systems to Taiwan concurrently. Since then, characterization techniques based on scanning electron microscopes such as EBSD and CL have played an increasingly important role in my research.

What research are you currently doing and what imaging challenges were you facing?

Currently, my major research interest is in electro-epitaxy of metals and compound semiconductors. By employing a combinatorial substrate approach, polycrystalline, instead of single-crystal, substrates are used in epitaxial growth. Under this circumstance, I heavily rely on SEM-based techniques such as EBSD, ECP, and ECCI to provide microstructural information of the epilayers in a non-destructive manner.

How did the ZEISS GeminiSEM column help you solve those challenges?

The ZEISS GeminiSEM column provides very good resolution at low kVs, which allows surface details of the epitaxial films to be inspected and observed. Moreover, the high-current electron beam at high energy allows electron channeling contrast images to be acquired easily for exploring the defects in the epilayers.

How do you use the ZEISS GeminiSEM column in your work?

The ZEISS GeminiSEM column was used to acquire high-quality in-lens, SE, and BSD images as well as conduct EDS and EBSD analyses.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

The ZEISS GeminiSEM column has helped us to acquire high-quality images for clarifying the following problems:

1. The growth mode of Ni, Co, and Zn epilayers in electrodeposition.

2. The early nucleation mechanism and subsequent growth mode of Cu2O and ZnO in electrochemical deposition.

3. The nano-twinned Ni structure obtained in electrodeposition.

4. The threading dislocations in various semiconductor epilayers.

If someone is considering the Gemini-column now, what suggestion would you give them?

The ZEISS SEM equipped with a Gemini-column is an easy-to-use and stable equipment that provides various types of images with high resolution and high contrast. However, users are obligated to have a deep understanding of the pros and cons of each imaging mode to choose the most appropriate imaging option for characterization.

What research are you currently doing and what imaging challenges were you facing?

The users of the Carl ZEISS GeminiSEM 300 are involved in research related to nanomaterials, thin films, metal and ceramic composites, microbial cells, etc. The morphologies, surface compositions, and dimensional analyses of samples are routinely required at our institute.

How did the ZEISS GeminiSEM column help you solve those challenges?

We are using the secondary electron imaging and energy dispersive spectroscopy (EDS) attached with the ZEISS GeminiSEM column extensively. In addition, we also use the backscattered electron detector (BSD) provided to us by ZEISS sometimes for the compositional analysis of the nanomaterial surfaces.

How do you use the ZEISS GeminiSEM column in your work?

My research group works on developing various types of sensors using different nanostructures. So, we use the ZEISS GeminiSEM 300 for the morphological and elemental composition studies of our samples. In addition, we develop immunosensors, which require proper and site-specific binding of antibodies on the graphene nanosheets. We use the ZEISS GeminiSEM to ascertain the same.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

We are able to achieve high-quality secondary electron images and EDS spectra with the ZEISS GeminiSEM column.

If someone is considering the ZEISS GeminiSEM column now, what would you tell them?

It is one of the present state-of-the-art systems of field-emission scanning electron microscopy (FESEM). Different types of signals are generated when an energetic electron beam interacts with a sample. It is a matter of availability of detectors with the ZEISS GeminiSEM column that one can capture various types of information about the samples. The ZEISS systems give you many detector ports and hence a good flexibility in terms of providing solutions to one's challenges. Also, the technical and service teams are quite supportive and prompt in offering help and solutions.

What research are you currently doing and what imaging challenges were you facing?

I am currently researching the imaging of dielectric films, such as Al2O3, with features smaller than 50 nm.

How did the ZEISS GeminiSEM column help you solve those challenges?

The ZEISS GeminiSEM column has very precise contrast and stigmation control, which has helped me image features smaller than 50 nm and dielectric samples with better precision. Additionally, the beam blanker in the ZEISS GeminiSEM column helps me avoid unnecessary exposure of the sample under investigation.

How do you use the ZEISS GeminiSEM column in your work?

Currently, I am using the column for low kV imaging.

What kind of results are you able to achieve with the ZEISS GeminiSEM column?

The ZEISS GeminiSEM column has helped me get sharper and clearer images, which allows me to investigate patterned samples more effectively. The cross-sectional images obtained with the ZEISS GeminiSEM column at both high and low kV are clear and provide a better picture of the process performed.

If someone is considering the ZEISS GeminiSEM column now, what would you tell them?

I would recommend the ZEISS GeminiSEM column as it helps in obtaining critical images with good precision.

What research are you currently doing and what imaging challenges were you facing?

Currently, we are working on the microstructural study of deformed and annealed metals and alloys. This basically involves using newer and conventional alloys, both of which we subject to deformation processing to give them different shapes. For all my future endeavors, the support of ZEISS is highly crucial because I have to see the structure of metals through microscopes. The better the microscopes are, the more durable they are, and that will help me in my research. I want a long-term association with ZEISS in all of its microstructural products. I was familiar with older versions of the microscope, but the latest version was introduced through this virtual platform, and in that, the people from ZEISS have really helped.

Because ZEISS microscopes are robust microscopes, our experiments require longer-term exposure and longer-term scanning of samples, which requires beam stability over a longer period of time. And in my personal experience, ZEISS microscopes are best suited for this. Moreover, it is also important to have very good service. Support equipment is procured for constant or long-term planned experiments. So, that has to be done without interruption, and that cannot happen without the support for the microscope from the technical staff.

How do you use the ZEISS GeminiSEM column in your work?

I am Soumita Mondal, working with Professor Satyam Suwas at IISc Bangalore in the Department of Materials Engineering. My work primarily focuses on severe plastic deformation of cubic materials. I mostly do this deformation by high pressure torsion. One thing the ZEISS instrument has done in my research is that it has made my research pace up a lot faster. Previously, what I would have to do is, since it is a bulk nanocrystalline structure in my material, I would have to make TEM specimens, which itself is very time-consuming, both by focused ion beam milling or by thin sample foil samples. But with the ZEISS GeminiSEM system, I can go up to very high resolution in electron backscattered diffraction mode itself.

So, one very good thing done by the SEM is that now my research is going much faster.

I am Tejnath Reddy, a third-year PhD student working under Professor Satyam Suwas in the Materials Engineering Department at the Indian Institute of Science, Bangalore. Since my research work involves the study of 3D microstructure, I need to do a lot of EBSD scans after serial sectioning. I used to do my EBSD scans on a different microscope, where the capturing speed and the EBSD scan time were very huge, and it was not practical for me to do large numbers of scans with a larger area and smaller strip size.

The ZEISS GeminiSEM microscope really helped me a lot to do faster scans at a smaller strip size. Another aspect which I would like to add is the versatility of the ZEISS GeminiSEM microscope is that it has the capability of imaging EBSD and along with that, electron channeling contrast microscopy.